Abstract
The Fabrication and Characteristic Study of Nb Ti and NbN Multilayers Films by DC Sputtering
- Title
- 直流濺鍍鈮、 鈦 、氮化鈮等多層薄膜物性之研究
- Translated title
- 直流濺鍍鈮、 鈦 、氮化鈮等多層薄膜物性之研究
- Creators
- 蔡哲銘
- Contributors
- 呂助增 (Advisor)
- Awarding Institution
- 國立清華大學, 物理系; Masters
- Theses and Dissertations
- Masters, 國立清華大學, 物理系
- Language
- Traditional Chinese
- Resource Type
- Thesis
- Date published
- 2001