Abstract
積體光學波導元件具有高度的靈敏度，不受電磁波干涉的影響，以 及能應用在各種危險的環境中，降低人類工作環境的危險，使人類 能獲得更大的方便，而目前所採用的為矽基板其在製程技術相當成 熟，因此未來較有利於製程的整合。 目前的元件設計是採用非對稱Mach-Zehnder的結構，利用兩臂不 等長產生相位差，當溫度改變時由於干涉現象使得元件的輸出端光 強度會隨之改變，目前實驗的結果證明干涉現象應用在溫度感測器 的可行性。Integrated optical waveguides are especially suitable for useoptical sensors for measuring pressure, temperature or gases,due to their specific physical and technical properties. Theadvantage of this well known and controlled silicon technologyis that optical and electronic circuits as well asmicromechanics can be integrated on the same substrate. It wouldbe particularly useful in application requiring immunity toelectrical noise. An integrated optical temperature sensorrequiring no electrical connection and consisting of unequalarm-length waveguide interferometers in silicon has beendesigned and the key components have been demonstrated. Theoptical transmission of each interferometer varies withtemperature due to the path length difference between the twoarms. The device is fabricated on a silicon substrate with athermal oxide as a buffer layer, the LPCVD nitride as aguiding layer. We define the rib waveguide pattern using RIE .Finally, we excite the light source with He-Ne laser, andfinish the measurement with the power meter.