Abstract
Micro-actuator, which generates mechanical movement, is one of the important components in micro-electro-mechanical system. Previously, the actuating mechanisms are controlled by electric circuit, including electrostatic, piezoelectric, thermal, electromagnetic, and shape memory alloys actuations. However, the commonly-used electric circuit lead often hinder the design and use of the structure and even increase the manufacturing difficulty. Moreover, the displacement of traditional micro-actuator only has one way. Therefore, micro-actuator which has no electric circuit and multi-way displacement is the goal of this paper. This study used e-beam lithography system and e-beam evaporator system to manufacture a novel wireless-magnetic actuator. The magnetic actuator composes of a thin cantilever beam and a rectangular plate which magnetic films deposit on. The magnetic actuator generates deflection under external magnetic field. We used optical microscopy to measure the relationship of deflection and external field. The results reveal that the magnetic actuator generates 12 μm of deflection under 1800 Gauss external field. More important, this is the first time observation that the reverse of magnetization on micro-actuator.