Abstract
This thesis presents a design methodology for a linear maglev stage.With the use of hybrid magnets that integrate permanent magnet with controllable electromagnet, it may be designed to consume near zero power as the suspended platen is at equilibrium position. Dissimilar from the design of maglev vehicle, the load variation and non-uniform load distribution are neglected, while the attention is paid to the precisely maintain the constant gap between the platen and rail. In order to ensure the stability of the maglev stage, the dynamic equations of the platen are derived and comparisons between three- and four-supporting control system are made. However, the fourth supporting magnet is redundant for a rigid platen, it may result in the control system unstable. In this study, three gap sensors are used to measurethe vertical position of the platen that is controlled by four actuatorslocated at the four corners. According to the analysis and design, the control system is implemented with a PC-based and state-feedback controller. The performance, such as stiffness, accuracy and power consumption, of the proposed linear maglev system is tested and evaluated.