Abstract
AbstractPart One:This research is probe into developing a method to qualitative and quantitative measurement of 10 volatile organic compound by using 24 hrs autosampler which gathered samples hourly.To the aspect of smapling method, multi-sorbent which inside filled with 0.2g Carbopack C, 0.2g Carbopack B and 0.2g Carbosieve SⅢ were used to gather sample under the room temperature. The samples were injected to GC/MS by thermal desorption system.Under the condition of 80% relative humidity and 1 liter sampling volume, the result showed that the MDL was from 0.38 to 0.78ppbv and the relative recovery yield was range from 96.2% to 98.2%.Appplying this method to LCD manufactory, 11 target compounds were measured successfully. The average concentration of Propylene glycol methyl ether acetate (PGMEA), butyl acetate and acetone were 288.7ppbv, 237.0ppbv and 75.9ppbv in A manufactory. In B manufactory, acetone was measure in every manufactural process section. The concentration of acetone was 695.7 ppbv in the photolithography process. While the concentration of propylene glycol methyl ether acetate (PGMEA) was 23.1 ppbv in photoresist zone. Part two:This research is aim to develop a method of qualitative and quantitative measurement of volatile organic compounds in the water by using impinger couple with cryogenic condensation-thermal desorption system. Sample was purged through impinger by nitrogen gas and gathered onto multi-sorent tube. In order to eliminate moisture interference, the multi-sorbent tube was dry-purged by helium gas.In the aspect of sampling, we used ISCO 6100 auto-sampler to collect the wastewater from the wastewater treatment factory. The result show that the major volatile organic compounds such as acetone, methyl isobutyl ketone, and dimethylsulfide were measured. Form the realtionship of their concentration, we calculate their efficiency of wastewater treatment respectively. The average efficiency of treatment of acetone was 90.9%, 2-butanone was 73.4%, and methyl isobutyl ketone was 95.2%.