Abstract
This thesis presents the design of a scratch drive actuator (SDA) for the bistable compliant mechanism applied to optical switching devices. In accordance with the force needed to drive the mechanism, the relationship among SDA output force, geometries, and applied voltage is first constructed by employing the principle of virtual work. The stresses and the equivalent constant of the spring system connected to SDA are calculated by assuming the configuration of the SDA as an overhanging beam. The SDA and the associated bistable compliant mechanism that are fitted to the demand of provision or protective optical switch are designed by considering the characteristics of MUMPsTM fabrication process. There are two types of SDA in combination with both the bistable mechanism and step motor being designed and fabricated as illustrative samples. The chip well defined in MUMPsTM is released by immersing the chip in a bath of HF. It is followed by cleaning in DI water and IPA on a hot plate at 200oC to reduce stiction. The samples are inspected by OM and SEM, respectively. The experimental and analytical results indicate the practicability of the proposed design concept.