Abstract
Wafer fabrication, one of the key processes in semiconductor manufacturing, is the most complex manufacturing process. It is complicated processes to involve reentrant characteristics, queue time limit and batching requirement. It exist some uncertainties like machine down and rework and yield, etc. They make its production planning and control even harder. Each semiconductor wafer fabrication plant devotes to develop a control policy that can improve production performance indices. In order to analyze the impact of limited waiting time and the information of upstream and downstream on product environments, In this paper, we are going to propose a new dispatching rule R-DJAH which can reduce the cycle time, the number of wafer rework and the number of the WIP in the system. Finally, by using simulation and design of experiment, we compare the production performance indices of R-DJAH and MBS. The factor of design of experiment is production traffic density. Results indicate that the R-DJAH is significant better and robust in average cycle time, the total number of wafer rework and the number of WIP in the system.