Abstract
Abstract This thesis is dedicated to the study of polyimide suspended membranes fabrication technology. And with the load-deflection method the residual stress and Young's modulus of the membranes can be calculated. We also use the polyimide membranes in the fabrication of a micro-generator. With a simple equipment set-up the generator electrical property also tested. We suggest a process technology to fabricate corrugated membranes, which will have improved dynamic range where could increase the generator output.