Abstract
When in nano-scale, materials bear different characteristics, suck as optical, electrical, and magnetic properties. Titanium is an important transition metal; it has a very high melting point and low mass density. Titania are widely used in photo-catalysts, gas sensors, photochromic and electochromic materials. In this research, We synthesize Titania nano structure by MPECVD (microwave plasma enhanced chemical vapor deposition). The morphology of Titania is rods. Its thinness, length, and width of cross-section are respectively several hundreds nanometer, and 20-30nm. Large amounts of single-crystal TiO2 nanorods are obtained on either poly-crystal Al2O3 substrate with Ti buff layer or using Au at catalysts. It has large effects on the morphology of TiO2 by changing reaction time and gas flowing rate. By using scanning electron microscopy, we can see the morphology and growing mechanism of Titania. X-ray and transmission electron microscopy indicated the structure of Titania was Rutile phase. In order to understanding binding status of Titania, we choose XPS for measuring. Cathodoluminescene can help us to understand the defect state of our Titania and also indicate that the ours shows great blue and infrared peak.