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製作奈米模板並探討嵌段共聚物於奈米模板下之自組裝現象
Thesis

製作奈米模板並探討嵌段共聚物於奈米模板下之自組裝現象

巫清景
Masters, 國立清華大學, 光電工程研究所
2015

Abstract

奈米模板 晶向 大面積 多重微影 嵌段共聚物 自組裝 聚苯乙烯-聚乳酸 微相分離 nano-templates Orientation Large-Area Multiple Lithography Block Copolymers Self-Assembly PS-PLLA Microphase Separation
The macromolecules synthesized by block copolymers can be controlled in size and shape, by choosing the length of the polymer chain segments to change the self-assembled patterns. In the past two decades, the fabrication of nanostructured thin films from the self-assembly of degradable block copolymers (BCPs) has attracted extensive attention. To create useful BCP thin films for practical uses, controlled ordering of self-assembled nanostructures is essential. In this research, we used a top-down approach --- a unique lithography and vertical integration method to make nano-templates for studying the BCP self-assembly in the templates. We keep the advantages of optical lithography to fabricate various nano-templates in a large area. The structures of nano-templates have flat bottom surface, acute corner and highly steep sidewall. Then we fill the block copolymers into the nano-templates to observe the phenomenon of self-assembly in nano-templates. This thesis studies the macromolecule synthesized by two block copolymer systems --- PS-PLLA poly (styrene-(L-lactide)) self-assembled on the nano-templets, and uses the solvent-annealing approach to create the regular nano-patterns via microphase separation. Through this method (DSA), we demonstrate orderly self-assembled nanoporous structures in those patterned nano-templates.

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