Abstract
Equipment constitutes the great majority of overall manufacturing cost in I.C. fabrication industry. It is therefore an important issue to measure the equipment efficiency properly. This research established a model to calculate total equipment efficiency using stepper as an example. Most industry practitioners consider overall equipment effectiveness (OEE) as the full story for efficiency. The research argued that the Overall Input Efficiency (OIE) is another important half of the equipment efficiency. Therefore total equipment efficiency is the product of OIE and OEE. To account for operational input efficiency four major components are proposed: facility, inputs manpower, raw materials, and consumables. The standards for ideal levels of inputs are proposed. An excel-based spreadsheet was established to facilitate computations of OIE, OEE, and TEE of the stepper equipment.