Abstract
The morphology of ultra thin Al films deposited by sputter onto three different substrates ;in three different temprature; with different thickness was investigate.
- Title
- 超平坦薄膜之製作與分析
- Translated title
- 超平坦薄膜之製作與分析
- Creators
- 許景棟 (Author)
- Contributors
- 吳信田 (Advisor)
- Awarding Institution
- National Tsing Hua University; Masters
- Theses and Dissertations
- Masters, National Tsing Hua University
- Resource Type
- Thesis
- Date published
- 2004
- Language
- English