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超微奈米鑽石薄膜製作平面場發射元件與其電子場發射特性
Thesis

超微奈米鑽石薄膜製作平面場發射元件與其電子場發射特性

劉晏綸
Masters, 國立清華大學, 材料科學工程學系
2005

Abstract

場發射 奈米鑽石 超音波震盪成核 field emission nano diamond ultrasonic nulceation
Ultra Nano Crystalline Diamond (UNCD) films and lateral emitters comprising UNCD were grown by using microwave plasma-enhanced chemical vapor deposition (MPCVD). We have investigated and discussed about how to improve the nucleation of UNCD films as well as the field emission properties of UNCD films and lateral emitters made by UNCD. Experiments were carried out with different powder composition to enhance ultrasonication nucleation and also studied the effects on the electric filed emission properties. We have found that the Ti and NCD mixed powder in methanol solution enhanced the morphology of the UNCD film with very small thickness (<200 nm) and its field emission property was also better than the other nucleation methods. To fabricate the UNCD lateral emitter, we have used sacrificial layer process and investigated the effect of geometric changes on the field emission properties. Lateral emitter with very small gap between the electrodes was fabricated (< 2 □m) with markedly reduced turn-on voltage. The increase in the number of tips and reduce in the cathode to cathode distance were also made in practice to increase the current density. Finally, we have used three different fabrication processes to fabricate the lateral emitter and studied its effect on the field emission properties. Efforts have been made to find an easy and convenient process to fabricate the UNCD lateral emitter with the field emission properties as best as possible.

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