Abstract
Transparent Conducting thin film is a remarkable thin film, it has application of solar cell and TFT-LCD. Indium Tin oxide is a important material of TCO. In the experiment,We choose new coating method-Pulse Arc deposition (PAD). It generates ultrahigh current desity to improve the quality of thin film at room temperature. Beside, We find the best coating condition by different bias and different target component. And use Four Point Probe,Hall measurement,AFM,SEM,XRD and spectrometer to measure it . We try to account of optical and electric properties, and drew conclustion from experimental data.