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適用於功率積體電路之準垂直型閘極絕緣雙極性電晶體與接面位障蕭基二極體
Thesis

適用於功率積體電路之準垂直型閘極絕緣雙極性電晶體與接面位障蕭基二極體

陳宏士
Masters, 國立清華大學, 電子工程研究所
2008

Abstract

功率元件 切換特性 準垂直型閘極絕緣雙極性電晶體 接面位障蕭基二極體 準垂直型金屬氧化物半導體場效電晶體
This thesis studies two novel structures that have low forward voltages—quasi-vertical IGBT and JBS diode. In addition, by incorporating the quasi-vertical design, the proposed devices are able to be integrated with other devices, very suitable in the application of power ICs. The devices were first designed using the simulator MEDICI and then taped-out using HV_0.5μm_5/100V_1P3M process. The simulation and measurement results indicate that the V-IGBTs with P-Sinker design have better forward capability than that of L-IGBT and VDMOS. At room temperature as well as at elevated temperatures, the proposed JBS diodes have lower forward voltage than that of the PN diodes in the same fabrication process. In terms of the turn-off time, it takes 200 ns for the fast JBS diodes to turn off, only half of the time required by the PN diodes.

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