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金奈米粒子及奈米壓印金屬在表面電漿元件上之應用
Thesis

金奈米粒子及奈米壓印金屬在表面電漿元件上之應用

莊尚餘
Masters, 國立清華大學, 生醫工程與環境科學系
2004

Abstract

金奈米粒子 表面電漿共振 奈米壓印微影 光學特性 Gold nanoparticles Surface plasmons resonance Nanoimprint lithography Optical constant
There are three parts in this thesis, including optical constants of gold nanoparticles, the enhanced sensitivity of surface plasmons resonance biosensor by nanoparticles, nanoimprint techniques for patterning metallic structures and their applications. The purpose of studying the optical constants of gold nanoparticles is to find out the reason of optical constants changes as the bulk gold films transferring to nanoparticles. We measured the ellipsometric parameters of gold nanoparticles with different particle-size, particle-density, and reduction methods by using varing angle spectroscopic ellipsoometer (VASE), and then fitted the optical constants of various gold nanoparticles. In the particles enhance the sensitivity of surface plasmons resonance biosensor, the sensitivity enhancement effects of different particle-size, particle-density and contact-area of gold nanoparticles were analyzed. For the nanoimprint techniques for patterning metallic structures, we successfully develop the technology of directly imprint the metal surface with low-pressure. The effects of various imprinting conditions were investigated. Optical devices such as polarizer and blazed grating were demonstrated. Combining with patterned metal structures and surface plasmonic devices, we can use the gratings with different period and amplitude to control the position of surface plasmonon resonance angle.

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