Abstract
1. Tisiz/ Poly-Si/SiO /Si氣化反應之動力學之討論。2. Tisiz/ Poly-Si/SiO /Si氣化反應之運動學之討論。
- Title
- 鈦矽化物薄膜在複晶矽上之氧化
- Translated title
- 鈦矽化物薄膜在複晶矽上之氧化
- Creators
- 朱盛德 (Author)
- Contributors
- 劉遠中陳建瑞 (Advisor)
- Awarding Institution
- National Tsing Hua University; Masters
- Theses and Dissertations
- Masters, National Tsing Hua University
- Resource Type
- Thesis
- Language
- English