Abstract
Au/PZT/Pt and Pt/PZT/Pt metal-insulator-metal(MIM) thin film capacitors are prepared by radio-frequency sputtering. Below 375K, the conduction current is found to be Ohmic at low field and space-charge-limited current (SCLC) at high field. At high temperatures (>375K), the conduction mechanism becomes Schottky emission at field between 0.2 and 0.8 MV/cm. Using Ohmic conduction, EF-EV = 0.6 eV and μ=2.93×10-6 cm2/V-sec are calculated. Et-EF = 0.09 eV and Nt=2.8×1018 cm-3 are obtained from SCLC effect. Au/PZT barrier height 0.89 eV is extracted by Schottky emission. Au/PZT/Pt band diagram is proposed. The conduction current of Pt/PZT/Pt is found to be Ohmic conduction at low field and Poole-Frankel emission at high field.