Abstract
Micro-Electro-Mechanical System (MEMS) is one of the potential research topics in this century and has rapidly grown in many different kinds of products, including communication. The advantages of the portable communication are lighter, smaller, and power-saved. It is until now the SAW devices are essential in mobile phone as the other devices are integrated in a chip. This study analyzes and designs a basic diamond film surface acoustic wave filter to obtain higher frequency filtering effect by reducing the line width of the electrodes. Since the diamond has the highest speed of the acoustic wave in all materials, the process limitation of the line width of electrode is not restricted if the higher frequency devices are required.The effective surface permittivity method is successfully used in this study to estimate the values of the electromechanical coupling coefficient for bulk materials and multi-layer structures. The theoretical analyses of the three models show that the frequency responses of the different SAW devices can be simulated through specifying the parameters of each device. Furthermore, it shows that the simulation results agree well with the experimental results.