Abstract
Large area of flexible pressure sensor array can be used in robot, human body or non-flat surface, also used in automotive electronics and medical fields. These macro-electronics is composed of many layers including flexible substrates, sensor array and the driving transistor array. This dissertation aims to develop a flexible pressure sensor array by integrating an organic vertical diode named polymer space-charge-limited diode with a pressure sensitive sensor. Solution process of the organic vertical diode, through material selection and process optimization, the on/off ratio is increased as high as 73 256. It can be used for 14MHz high-frequency operation, and have air-stable features. Pressure sensor is composed of many layers including flexible substrates, silver conductive adhesive paste and polymer composites. Through the manufacturing process optimization makes the conductance is proportional to pressure and reduces the sensor drift and hysteresis. The response time of sensor device is only 150us. Finally, combine pressure sensor and diode into a flexible array, the smaller resistance when the pressure is greater. When the diode in reverse bias, the voltage of measurement system is independent of the resistance of sensor. Diodes with current-limiting effect, making this array is more accurate and more energy-saving than usual passive sensor array.