Abstract
The thin film transistor liquid crystal display is widely used, but it has high power consumption. Therefore, the development trend of the display technology is pursuing energy saving in recent years. The micro LED display has the great development potential and several advantages, for example, self-emission, low power consumption, and high light ultilization. However, the low assembly efficiency of the micro LED display is the main obstacle for commercialization and related applications. This study ultilizes MEMS technology to shrink the size of vacuum pick-up collects and uses the array structure design to implement the micro pick-up array. It can be applied to micro LED batch transfer to overcome the assembly efficiency problem. Structures of the presented micro pick-up array include arrays of vacuum holes, column supports, the frame support and contact surfaces. Among of them, vacuum holes and column supports are the key design for the deformation suppression of chips and structures in order to greatly aid the suction.