Abstract
The main goal of this research is to develop the in-situ heating electron microscopy applied on dynamic observation of material’s reaction process including atomic diffusion, nucleation, and grain growth. The in-situ heating systems are set up in scanning and transmission electron microscope respectively for dynamic analysis of aluminum-induced solid-phase epitaxy (Al-SPE). Comparing with the specifications of commercial holders, the self-designed heating stage for scanning electron microscope (SEM) and heating holder for transmission electron microscope (TEM) are developed to each requirement of instrument respectively. The heating system for SEM is composed of the heat insulator, sample carrier and the ceramic heating element, equipped with a temperature control system. The temperature range of this self-designed SEM heating system is from room temperature to 500℃. On the other hand, the heating system for TEM is composed of the toroidal coils, put in self-designed heating holder, and a DC power supply, which can heat up to 500℃ for in situ analysis. With commercial heating holder and self-designed heating system, the dynamic reaction of aluminum-induced heteroepitaxial SiGe on sc-Si (100) substrate at low temperature (lower than 725K) is observed and further verified the reaction mechanism of Al-SPE with EDS and motion images.