Abstract
Among the flash memories developed recently, BiNOR flash memory enlists several unique and promising features. In particular, its read current exhibit fairly different characteristics from that of the conventional flash memories. In this dissertation, the impact of the N field oxide isolation inherent to its structure to the read characteristics is analyzed and discussed. A novel trench source line method is proposed to further increase its read current. This method not only has many advantages of process flexibility and simplicity, but also provides enhance read current compared with the original structure. Consequently, the trench source line is demonstrated as a feasible method for BiNOR to implement fast random access operation in the future.