Abstract
We builf up an Ion Beam Sputter Deposition System(IBSD) in the department of Engineering and System Science, NTHU. We utilise this system to prepare NiFe thin film. The thin film made by IBSD has the advantages higher packing density and lower roughness. The NiFe are soft magnetic material usually used in commercial product and it’s structure and magnetic are important problem to nano-magnetic devices. The NiFe thin film structure might be affected by the thin film growth condition (deposition rate, growth temperature and ion entering direction induced magnetic anisotropy). We utilise MOKE to measure the NiFe thin film magnetism and NSRRC beam line to determine the thin film structure and composition of NiFe. We will compare the thin film growth condition, structure and magnetic property in this thesis.