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電子吸收式調變器與分佈迴授式雷射二極體之積體化製程及特性分析
Thesis

電子吸收式調變器與分佈迴授式雷射二極體之積體化製程及特性分析

田雅德
Masters, 國立清華大學, 電子工程研究所
1999

Abstract

Distributed Feedback Laser 電子吸收式的光調變器 Distributed Feedback Laser DFB Laser Electroabsorption Modulator EA Modulator butt-jointed InGaAsP/InP
For the distance more than 100 kilometer fiber communication system, low dispersion and intrinsic attenuation is necessary. So the EA modulator integrated DFB Laser is more ideal. In this thesis, we used butt-jointed technology to fabricate integration single source. We used 1.55mm InGaAsP for active layer growth on InP substrate . For electroabsorption modulator part, the structure is similar to DFB Laser. We changed the wavelength muti quantum- well . The wavelength is 1.50mm for single modulate. We have successfully fabricated external modulate Laser (EML) with extinction ratio of -5.51dB, coupling effect of 0.6, side mode suppression ratio (SMSR) of 30dB, light-current threshold current of 65 mA and slop efficiency (S.E.) of 0.05. We also measured the only DFB Laser part with side mode suppression ratio (SMSR) of 32dB, light-current threshold current of 52 mA and slop efficiency (S.E.) of 0.18. After integration, although the threshold current、S.E.、SMSR were reduce. We can improve them in structure, fabricate and crystal growth three part three way. In present we have arrived the static modulate stage.

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