- Title
- 電漿化學氣相蒸鍍氮氧化矽於III-V族化合物半導體其薄膜與界面特性之研究
- Translated title
- 電漿化學氣相蒸鍍氮氧化矽於III-V族化合物半導體其薄膜與界面特性之研究
- Creators
- 吳清沂 (Author)
- Contributors
- 林敏雄 (Advisor)
- Awarding Institution
- National Tsing Hua University; Masters
- Theses and Dissertations
- Masters, National Tsing Hua University
- Resource Type
- Thesis
- Language
- English
Thesis
電漿化學氣相蒸鍍氮氧化矽於III-V族化合物半導體其薄膜與界面特性之研究
Masters, National Tsing Hua University
1986
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