Abstract
This thesis presents a scanning mirror which is made of single crystal silicon structure with perfect reflective mirror plate, high quality factor, and high reliability. The driving force can be applied on the scanning mirror through the ferromagnetic material under the magnetic field. The design eliminates complicated coil routing and insulation layer deposition, and magnets. The rib structure on backside of mirror is designed to reduce the mass/stiffness ratio of the mirror plate. This study designs the “lever arm” structure and covered with ferromagnetic material to enhance the torque applied on the mirror. Beside, the magnetization of the ferromagnetic material is influenced by its planar geometry shape. Thus, this study also varying the geometric pattern of the ferromagnetic material covered on the “lever arm” to further increase the magneto-static force. The static measures of the scanning mirror include curvature and roughness of the mirror plate and thickness of ferromagnetic material. The dynamic measurement of the scanning mirror include frequency response, optical scanning angle versus driving power, affect by magnetization, and scanning pattern. The concept of magneto-static scanner is possible to apply to display refer to above measurements and testing.