Abstract
In the past tens years, most researches about micro-grippers focused on the mechanism of actuation, special material application, and sophisticated structure design, trying to apply micro-actuators to micro-manipulation. As a result, most researchers described the characteristic of micro-grippers in the way of micro-actuators, by maximum force or displacement. Although he relationship of force and displacement between maximum force and displacement is very important, few researchers placed emphasis on it.. As a result, electrostatic and electro-thermal micro-grippers have been further studies in this research through the realization and measurement of comb-drive micro-grippers, cold-hot beam micro-grippers, and curved-electrode micro-grippers on SOI wafer. In addition to characteristics, two methods to dissolve the problems of applications have been proposed. First one is the high frequency vibration of micro-grippers, by which the stick problem of micro beads has been dissolved above the scale of micro-meter. The other is polymer isolation. By enveloping conductive parts with Parylene C, hydrolysis problem has been solved completely. Through the improved methods, micro-grippers can be applied in smaller scale and under solution.