Abstract
1.The effects of Ti cap stack on Hf base dielectrics in Si MOSFET. Effects of Ti cap stack HfO2 for higher-k MOSFET. The influence of electrical characteristics with / without PDA. The influence of Ti cap stack HfO2 for N、P MOSFET 2.The effects of TaON stack on Hf base SiGe MOSFET. Effects of TaON stack HfO2 for SiGe MOSFET. The influence of electrical characteristics with / without PDA. 3.The effects of TiON stack on Hf base SiGe MOSFET. Effects of TiON stack HfO2 for SiGe MOSFET. The influence of electrical characteristics with / without PDA.