Abstract
The concept of bionic is applied in this thesis. Make use of the principle of superposition to imitate the muscle’s action. Using polymer as material try to produce electrostatic microactuator. The achievements of this study as below:Firstly, control the heating time and temperature moreover using the JSR THB-430N Negative photoresist had been successfully fulfilled the photoresist structure that the length is 5mm and the aspect ratio is 4.Secondly, JSR THB-430N can is completely removed at the room temperature by JSR THB-S2 as striper.Thirdly, while the whole Si-wafer can be completely etched by the w.t. 30% KOH at 90℃, integrating PDMS with electroplating structures can be transfer to the glass wafer.Fourthly, efficiently increase the thickness by the electroplating technique. Hence, the devices can be smoothly departed from the surface of Si-wafer and the entity of polymeric microactuator can be maintained.Fifthly, polymer is used as material to produce electrostatic microactuator. The basic functions of the polymeric microactuator had be tested: the operation voltage is 130V, and the maximum operation frequency is 10Hz. The maximum deformation is 6.67% while the operation voltage is 350V.The future work of this study is all structures of microactuator, including the plate of capacitance, would be made of polymeric material.