Abstract
The present study has employed the half-digital phase-locked loop (PLL) as the driving system to ensure the microacuator working frequency fixed on its resonant frequency. Because there is no influence on the stability of half-digital PLLs when the amplitude of input signal is changing, the half-digital PLL is more robust than the analog PLL. Matlab/Simulink 7.1 is used in the simulation with the designed PLL. In terms of implementation, the off-the-shelf IC components are used to realize the PLL driving system, and applied to drive the RLC circuits and micro scanning mirrors. In the experimental results, the designed PLL successfully tracks the resonant frequency of micro scanning mirrors and RLC circuits with various system parameters. In the future, the driving system can be used in driving micro-gyroscope for sensitivity-promoting.