Abstract
The current study analyzes the properties of glass and silicon kerf under Abrasive Suspension Jet (ASJ) cutting. The system consists of a high-pressure cylinder and piston. The highly pressurized water from the pump pushes the isolator downward while the premixed slurry is pumped through the orifice. The system is operated under 105 MPa with a 0.1-mm diameter orifice. The relations between the abrasive volume concentration, pressure, traverse speed, abrasive size, the kerf width at upper, bottom and affected zones, kerf ratio, kerf taper, roughness, and the maximum traverse speed were studied. Scanning Electron Microscope (SEM) and optical microscope were used to observe the surface waviness of kerf, plastic flow and trace of abrasives under impact. The experiment results show that the maximum traverse speed occurs at the pressure of 105 MPa, 5% volume concentration, and 1500 mesh SiC abrasive, while the minimum roughness occurs at the pressure of 70 MPa and 2000 mesh SiC abrasive.