2-D fully integrated aerosol based PZT actuated optical scanner

Journal article

Peer reviewed

Wei-Shun Hua, Wen-Jong Wu and Wei-Chih Wang

Journal of Intelligent Material Systems and Structures Journal of Intelligent Material Systems and Structures, Vol.21

2010

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Title: 2-D fully integrated aerosol based PZT actuated optical scanner
Creators - without role: Wei-Shun Hua
Wen-Jong Wu
Wei-Chih Wang - 國立清華大學工學院動力機械工程學系
Publication Details: Journal of Intelligent Material Systems and Structures Journal of Intelligent Material Systems and Structures, Vol.21
Identifiers: 9957769084106774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Journal article