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3-D Self-Aligned Stacked Ge Nanowire pGAAFET on Si nFinFET of Single Gate CFET
Journal article

3-D Self-Aligned Stacked Ge Nanowire pGAAFET on Si nFinFET of Single Gate CFET

永俊 吳
IEEE Journal of the Electron Devices Society
2023

Abstract

CFET;Ge

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