- 題名
- 3-D Self-Aligned Stacked Ge Nanowire pGAAFET on Si nFinFET of Single Gate CFET
- 創作者：
- Yi-Wen Lin - National Tsing Hua UniversityShan-Wen Lin - National Tsing Hua UniversityBo-An Chen - Department of Engineering and System Science, National Tsing Hua University, Hsinchu, TaiwanChong-Jhe Sun - National Tsing Hua UniversitySiao-Cheng Yan - National Tsing Hua UniversityGuang-Li Luo - Taiwan Semiconductor Manufacturing Company (Taiwan)Yung-Chun Wu - Department of Engineering and System Science, National Tsing Hua University, Hsinchu, TaiwanFu-Ju Hou - Taiwan Semiconductor Manufacturing Company (Taiwan)
- 總頁數
- 5
- 學術資源類型
- 期刊文章
- 出版日期
- 01/01/2023
- 出版資訊
- IEEE journal of the Electron Devices Society, 卷.11, 頁碼.480-484
- 語言
- 英語
期刊文章
3-D Self-Aligned Stacked Ge Nanowire pGAAFET on Si nFinFET of Single Gate CFET
IEEE journal of the Electron Devices Society, 卷.11, 頁碼.480-484
01/01/2023
指標
1 檢視次數