摘要
This work reports multi-mode surface acoustic wave resonances in a lithium niobate on silicon carbide (LiNbO3/SiC) heterostructure, achieving high resonant frequency-quality factor (f-Q) products over a broad frequency range from 5 to 24 GHz. By employing a 600-nm-thick LiNbO3 functional layer, multiple high-velocity acoustic modes with wavelengths (
λ) ranging from 0.24 to 0.8
μm are effectively confined. This strong energy confinement arises from the large acoustic impedance mismatch between the LiNbO3 thin film and the high-phase-velocity SiC substrate, enabling the selected modes to consistently exhibit high f-Q products exceeding
1012 with a maximum f-Q product of 1.6
×1013 achieved for the SH1 mode at 10.6 GHz. The operating frequency is further extended to the millimeter-wave regime at 24.45 GHz with a shorter
λ of 0.24
μm while maintaining an excellent f-Q product of 6
×1012. These results highlight the strong potential of the LiNbO3/SiC platform for the development of frequency-scalable, high-performance acoustic devices for next-generation communication systems.