摘要
In this work, a real-time PM2.5 sensor module with high mass resolution and wide detection range is successfully demonstrated while the module consists of a two-stage aerosol impactor, a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS oscillator, and a micro-pump. The aerosol impactor's collection efficiency of 51% for 2.54mu text{m} and 50% for 1.03mu text{m} is verified for stage 1 and stage 2, respectively. A length-extensional mode TPoS MEMS resonator is implemented, featuring a resonant frequency of 4.05 MHz and a quality factor ( {Q} ) of 438 in air. To achieve a portable sensor module, a board-level sustaining circuit, which includes a transimpedance amplifier (TIA), a phase shifter, a band-pass filter, and a buffer circuit are integrated to fulfill the condition of Barkhausen criteria for oscillation. Phase noise of -111.92 dBc/Hz at 1 kHz offset was recorded under ambient pressure and room temperature for a carrier frequency of 4.05 MHz. The mass resolution for the PM2.5 sensor implemented in this work is 0.71 pg. Finally, an incense was used to produce the liquid type particles continuously for the aerosol measurement. The coefficient of determination ( {R} {2} ) of 0.81 between the frequency slope of the proposed sensor and the aerosol concentration of the commercial optical aerosol sensor within a range of 10mu g/m3 to 1000mu g/m3. This work successfully integrated MEMS, circuit, and air flow technologies to realize a complete mass sensing module, and has the potential to be implemented in the particulate matter concentration monitoring applications of air.