摘要
A wide-width clamped-clamped beam (CC-beam) resonator and a filter realized using mechanically-coupled resonator tanks have been extensively characterized to attain mixler (i.e., mixer-filter) functionality for a chip-scale frequency translation. Such a resonator has been driven into the nonlinear regime to explore its effect on the mixler operation as well as to obtain the best phase noise performance using the phase-feedback method. The proposed electrostatically transduced mixler operates by utilizing the local oscillator (LO) signal generated from the resonator itself, thus eliminating the need of a function generator or an external quartz crystal oscillator. This technique implemented with all the components on the same silicon substrate shows great potential for miniaturization in wireless communication while achieving 14.4 dB overall mixler loss.