A healable amino silane self-assembled monolayer incorporating polymer capped palladium nanoclusters and its application as the copper diffusion barrier layer on silicon wafer

期刊文章

開放取用(OA)

Wei-Yen Wang, Vidya Kattoor, Pei-Qing Yang, Pei-Tsen Wei, Yan-Ping Zhang, Chih-Ming Chen 和子健衛

Next Materials, 卷.04

07/2024

摘要

amino silane;palladium;nanocluster;silicon wafer

url

https://doi.org/10.1016/j.nxmate.2024.100218檢視

已出版(紀錄版本) 開放

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題名: A healable amino silane self-assembled monolayer incorporating polymer capped palladium nanoclusters and its application as the copper diffusion barrier layer on silicon wafer
創作者：: Wei-Yen Wang (作者)
Vidya Kattoor (作者) - National Tsing Hua University
Pei-Qing Yang (作者) - National Tsing Hua University
Pei-Tsen Wei (作者) - National Tsing Hua University
Yan-Ping Zhang (作者)
Chih-Ming Chen (作者)
子健衛 (作者)
學術資源類型: 期刊文章
出版日期: 07/2024
出版資訊: Next Materials, 卷.04
語言: 英語