Abstract
A piezoelectric-driven Scott-Russel linear micropositioner utilizing the stick-slip effect of friction to drive a slider is presented. Effects of sawtooth, impulse, and transcendental electrical wave forms on the device performance are studied via numerical simulation and experiment test. The experiment demonstrates that positioning step sizes of 0.05-120 μm can be achieved at low input voltages of 2-25 V and essentially with unlimited travel range. © 1999 American Institute of Physics.