Abstract
Toward the development of micropumps that operate under low external air pressures, a new polydimethylsiloxane (PDMS), pneumatic micropump using amplified deformation of resilient PDMS membranes through oil hydraulics was presented in this study. The new micropump employed oil-hydraulic chambers with pre-filled mineral oil to amplify the deformation of flexible PDMS membranes; it therefore delivered a higher pumping rate and withstood a greater back pressure while requiring a significantly lower external air pressure for actuation. The optimized pumping rate and back pressure of the oil-hydraulic micropump compared favorably to previous pneumatic micropumps. Characterization of the micropump revealed that the oil hydraulics amplified the deformation of PDMS membranes by approximately threefold and improved the pumping rate and the back pressure by 77 and 21 %, respectively. With high pumping performances and the capability to be driven with only a low air pressure, this new micropump may therefore become a key component in future microfluidic devices and lab-on-a-chip systems. © 2013 Springer-Verlag Berlin Heidelberg.