Abstract
A novel ac electrokinetic microfluidic driver based on alternating current electro-osmosis flow induced by asymmetrically capacitance/chemistry-modulated microelectrode arrays has been successfully developed and demonstrated. Asymmetric capacitance modulation (ACM) is made of comb electrode arrays and parts of individual electrode surfaces are modulated/deposited with a SiO 2 dielectric layer. This proposed design can be utilized to shift the optimal operation frequency of maximum velocity to a higher frequency to minimize electrolytic bubble generation and enhance micropumping performance. The pumping velocity, described in this paper, is measured via the tracing of microbeads and is a function of applied potential, signal frequency, buffer concentration, and dielectric layer thickness. A maximum pumping velocity up to 290 μm s -1 in 5 mM buffer solution with the applied potential of 10 Vpp is observed in our prototype device, and the estimated maximum flow rate is up to 26.1 μl h -1 . This is the first successful demonstration regarding bubble-free ac electrokinetic micropumping via such asymmetrically capacitance-modulated electrode arrays. Design, simulation, microfabrication, experimental result, and theoretical model are described in this paper to characterize and exhibit the performance of the proposed novel bubble-free ac electrokinetic microfluidic driver. © The Royal Society of Chemistry.