AI-powered precursor quantification in atmospheric pressure plasma jet thin film deposition via optical emission spectroscopy

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Mao-Chuan Chen, Yun-Chung Lee, Jia He Tee, 明蒼李, Chuan-Kang Ting 和 Jia-Yang Juang

Plasma Sources Science and Technology, 卷.33(10)

2024

摘要

: artificial intelligence (AI), atmospheric pressu

url

https://doi.org/10.1088/1361-6595/ad80c6檢視

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題名: AI-powered precursor quantification in atmospheric pressure plasma jet thin film deposition via optical emission spectroscopy
創作者：: Mao-Chuan Chen (作者) - National Taiwan University
Yun-Chung Lee (作者) - National Taiwan University
Jia He Tee (作者) - National Tsing Hua University
明蒼李 (作者)
Chuan-Kang Ting (作者) - National Tsing Hua University
Jia-Yang Juang (作者) - National Taiwan University
學術資源類型: 期刊文章
出版日期: 2024
出版資訊: Plasma Sources Science and Technology, 卷.33(10)
語言: 英語