Alleviating high temperature magnesium implanted radiation damage of GaN through nitrogen plasma surface treatment

期刊文章

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Ya Xun Lin, Der Sheng Chao, Jenq Horng Liang, Chih Ming Lin, Richard J. Potter, Harry Finch, Vinod R. Dhanak, Steve Hall 和 Ivona Z. Mitrovic

Journal of physics. D, Applied physics, 卷.58(26), 頁.265106

30/06/2025

摘要

gallium nitride

Mg-ion implantation

nitrogen plasma

url

https://doi.org/10.1088/1361-6463/addfe5檢視

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題名: Alleviating high temperature magnesium implanted radiation damage of GaN through nitrogen plasma surface treatment
創作者：: Ya Xun Lin - University of Liverpool
Der Sheng Chao - National Tsing Hua University
Jenq Horng Liang - National Tsing Hua University
Chih Ming Lin - Department of Physics, National Tsing Hua University, Hsinchu, Taiwan
Richard J. Potter - University of Liverpool
Harry Finch - University of Liverpool
Vinod R. Dhanak - University of Liverpool
Steve Hall - University of Liverpool
Ivona Z. Mitrovic - University of Liverpool
補助款備註: National Tsing Hua University (http://data.elsevier.com/vocabulary/SciValFunders/501100005057) Engineering and Physical Sciences Research Council (http://data.elsevier.com/vocabulary/SciValFunders/501100000266) National Science and Technology Council (http://data.elsevier.com/vocabulary/SciValFunders/501100020950) 2023-2024; EP/X525741/1 / Engineering and Physical Sciences Research Council (http://data.elsevier.com/vocabulary/SciValFunders/501100000266) 114-NU-E-007-002-NU / National Science and Technology Council (http://data.elsevier.com/vocabulary/SciValFunders/501100020950)
學術資源類型: 期刊文章
出版日期: 30/06/2025
出版資訊: Journal of physics. D, Applied physics, 卷.58(26), 頁.265106
語言: 英語