摘要
Garnet Li 7 La 3 Zr 2 O 12 (LLZO) is a promising solid-state electrolyte due to its wide electrochemical stability window and high Li-ion conductivity. This electrolyte has potential to be employed in the form of thin films for solid-state batteries, a promising approach in the quest for safer batteries with higher energy densities at lower fabrication costs. In this study, we use a scalable cosputtering process to fabricate LLZO thin films with subsequent postannealing at a temperature of 700 °C, significantly below the sintering temperatures employed in ceramic pellet processing. We investigate the roles that Li excess and incorporation of Al play in the film's crystalline phase, microstructure, phase stability, and, ultimately, ionic conductivity. Our results reveal that improving the conductivity of LLZO thin films requires not only the stabilization of the cubic phase but especially the densification of the film and the minimization of the proton exchange degradation mechanism in the presence of moisture and CO 2 . These issues can be mitigated by effectively controlling the amount of Li and incorporating Al as sintering agent. An ionic conductivity at room temperature of 1.9 × 10 -5 S cm -1 was achieved with a 400 nm Al-substituted LLZO thin film. Finally, we prove that these LLZO thin films can be successfully deposited and crystallized on a LiCoO 2 cathode.