Abstract
Scheduling for wafer fabrication of advanced technology nodes entails complicated constraints such as limited waiting times. Focusing on real settings, this paper aims to develop a novel genetic algorithm of multi-subpopulation parameters with hybrid estimation of distribution (MSPHEDA) to solve the present problem effectively and efficiently. To estimate the validity of this approach, ten scenarios were simulated on the basis of empirical data as the basis to compare the performance of MSPHEDA and other heuristic methods for minimizing makespan and reducing the total exceeded limited waiting time. The results have shown practical viability of the proposed approach.