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An analytical model of short-channel effect for metal-oxide-semiconductor field-effect transistor with insulated shallow extension
Journal article   Peer reviewed

An analytical model of short-channel effect for metal-oxide-semiconductor field-effect transistor with insulated shallow extension

Chun-Hsing Shih, Yi-Min Chen and Chenhsin Lien
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol.43(12), pp.7993-7996
12/2004

Abstract

Effective doping Insulated shallow extension MOSFET Scale length Short-channel effect
In this paper, we present an analytical short-channel threshold voltage model without any fitting parameter for the metal-oxide-semiconductor field-effect Transistor (MOSFET) with insulated shallow extension (ISE). Excellent agreements between the numerical simulated results and this model are obtained. Very good suppression of the short-channel effect is observed for this ISE MOSFET. Both the sidewall-oxide thickness and shallow-extension depth play a major role in containing the short-channel effect. The threshold-voltage equation is found by using the effective-doping model. The effective doping is derived from the knowledge of the channel potential. The channel potential is obtained by the scale-length approach to solve 2D Poisson's equation.

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