Abstract
A three-dimensional finite element model of an electrothermal microactuator (so-called 'hot-cold-beam actuator') is developed using the ANSYS™ finite element analysis (FEA) simulation program (ANSYS 1992 User's Manual for Revision 5.5.1 (Houston, PA: Swanson Analysis Systems, Inc.)). The actuator is geometrically scaled (except the thickness) to explore the effect of dimension variation on the performance of the actuator. The model is then used to optimize the actuator for robust design. Two types of actuator are also studied here: one with a suspended polysilicon structure and the other with additional gold-layer deposition. The results reveal that a greater deflection can be obtained for gold-plated actuators. An L 18 Taguchi matrix is developed to investigate the effects of dimensional variation on the performance of the actuator. It is found that total actuator length contributes the major influence to the performance of the actuator. A maximum deflection is realized as the cold-beam length reaches about 86% of the hot-beam length of the actuator. Experiments are also conducted to verify numerical data. The results are in good agreement with analytical simulations to a certain electrical current regime. Finally, our robust design concludes that a gold-plated actuator with a 250 μm long, 3.5 μm thick, 2 μm wide hot beam and a 215 μm long, 3.5 μm thick, 15 μm wide cold beam can deflect up to 20.2 μm at a driving current of 6.2 mA.