- Title
- Analytic theory of symmetric two-beam interference in high-NA optical lithography
- Creators - without role
- Shinn-Sheng Yu本堅 林
- Identifiers
- 9957774977506774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
- Publication Details
- SPIE Proceedings, Vol.5754, pp.1113-1127
Journal article
Analytic theory of symmetric two-beam interference in high-NA optical lithography
SPIE Proceedings, Vol.5754, pp.1113-1127
2005
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