Logo image
Annealing-induced near-surface ordering in disordered Ga0.5In0.5P
Journal article   Open access

Annealing-induced near-surface ordering in disordered Ga0.5In0.5P

J.S. Luo, J.M. Olson and Meng-Chyi Wu
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol.13(4), pp.1755-1759
07/1995

Abstract

The effects of annealing (in PH 3 /H 2 ) atmosphere on LPE-grown Ga 0.5 In 0.5 P are studied using ex situ and in situ reflectance difference spectral (RDS) features. Both the annealing temperatures and times used are found to have virtually no effect on the bulk optical or structural properties of metalorganic chemical vapor deposition (MOCVD)-grown Ga 0.5 In 0.5 P. For LPE-grown Ga 0.5 In 0.5 P, annealing is found to induce bulk-like RDS features at both E 0 and E 1 with line shapes similar to those observed for MOCVD-grown ordered Ga 0.5 In 0.5 P.
url
https://doi.org/10.1116/1.587808View
Published (Version of record) Open

Related links

Metrics

1 Record Views

Details

Logo image